Tables

TABLE 2-1 Environmental Requirements

TABLE 4-1 Gas Limit Recommendations

TABLE 4-2 Filter Efficiency Comparison

TABLE 4-3 Cleaning Schedule

TABLE 6-1 FIPS PUB 94 Tolerances Chart

TABLE 6-2 Power Conditioning Technology

TABLE 6-3 Electrostatic Voltage At Workstations

TABLE A-1 Conversion Factors